A light field compensation method for segment projection grating measurement, and the equipment thereof

This invention relates to a light field compensation method for segment projection grating measurement, and the equipment thereof. It comprises the following procedures: (1) Preparation step. (2) Generation of non-grating image step. (3) Generation of grating image step. (4) Image combination and co...

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Bibliographic Details
Main Authors YEH, MAU-SHIUN, CHOU, YUNG-FANG, CHANG, WEI CHENG, LIN, CHIA-HAU, LEE, JYH-FA, LIN, CHERN-SHENG
Format Patent
LanguageChinese
English
Published 16.08.2008
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:This invention relates to a light field compensation method for segment projection grating measurement, and the equipment thereof. It comprises the following procedures: (1) Preparation step. (2) Generation of non-grating image step. (3) Generation of grating image step. (4) Image combination and compensation step. (5) Projection and image acquisition step. (6) Three-dimensional outline analysis and reconstruction step. and (7). Finish step. This invention utilizes an image processing apparatus, a projection apparatus, and a camera to perform the image processing and image compensation for the non-grating image and grating image sequentially. Therefore, it acquires a clear and accurate image. Moreover, it performs three-dimensional outline measurement and reconstruction for a measured object. Eventually, it achieves the effects of the light field compensation function, and provides an easy way to calculate the height of a measured object by means of segment projection method.
Bibliography:Application Number: TW20070105403