Method with the three dimensional outline measuring and the system of reconstruction which has a sub-pixel positing of coloring optical gratings and single monitor with main and sub-frame switching

• Main Authors: YEH, MAU-SHIUN, KU, SHIH-LIANG, LIN, CHIA-HAU, LEE, JYH-FA, LIN, CHERN-SHENG
• Format: Patent
• Language: Chinese; English
• Published: 16.03.2008
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention is a kind of method with the three dimensional outline measuring and the system of reconstruction which has the sub-pixel positing of coloring optical gratings and single monitor with main and sub-frame switching. The method includes pre-step; projected step; video acquired step; video fine tuning step; video processing step; and reconstructive step. The system includes a projected apparatus which emits the beam from the optical grating to DUT; an image from the optical grating on DUT and has the same contrast on the plural grating lines; a CPU can reconstruct 3-D profile of DUT using optical grating imaging with fine tuning main and sub-frames. So achieved the optical grating has the same contrast to be easy to distinguish, the monitor has main- and sub-frames can be switched, and adjusting the optical grating with modified module.