Probe unit and inspecting apparatus

• Main Authors: MIURA, KAZUYOSHI, AKAHIRA, MEGUMI, SAITOH, TOYOKAZU
• Format: Patent
• Language: Chinese; English
• Published: 16.12.2007
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TESTING

An inspecting apparatus is constituted so that the parts provided on an inner side surface of a probe unit 31 can be detached from the outside without inclining the probe unit 31 to the operator's side and the workability in maintenance is improved. The probe unit 31 is used to inspect a liquid crystal panel 37. The probe unit 31 includes a fixing block 40 for supporting the whole; a mounting block 41 supported to the fixing block 40; a supporting block 42 integrally mounted to the mounting block 41; a probe assembly 34 inserted into and supported to the supporting block 42, and a connecting cable 35 supported on aninner side surface of the supporting block 42 and electrically connected to the probe assembly 34. The supporting block 42 includes an enlarged portion 70 larger than the width of the mounting block 41; and screw holes 71 for attaching and detaching, to and from the outside of the device body, screws 72 for fixing the connecting cable 35 to the enlarged portion 70.