Co-focal microscopic imaging system with adjustable light source pattern

• Main Authors: LIN, CHANGING, YEH, KOUNG-MING, FANG, YIIN, LU, YINGNG, WU, JIA-HUA
• Format: Patent
• Language: Chinese; English
• Published: 01.07.2007
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

A co-focal microscopic imaging system with adjustable light source pattern includes: a light source module capable of conducting programmable control onto the output light patterns; a filtering polarization conversion device for converting a light beam passed into a polarized light beam with a pre-determined wavelength; a polarization spectral device for altering the direction of electric field and phase of a polarized light beam passed; a piezoelectric platform for mounting and driving an article-under-test for displacement; a first lens set for focusing the polarized light, which is passed through the polarization spectral device, over the whole domain in a plane manner to a face-under-test of the article-under-test; and a digital imaging device for processing the polarized light, which is reflected from the face-under-test and has passed through the polarization spectral device, into an enlarged image. The invented system mainly uses a serial patterned light produced by the light source module and a transv