Alloy target for conductive film or its protection layer and manufacturing method thereof

An alloy target for conductive film or its protection layer comprises copper (Cu), nickel (Ni) and zinc (Zn), wherein copper is about 50 to 80 weight percentages, nickel is about 5 to 20 weight percentages and zinc is about 15 to 30 weight percentages and the total weight percentages of the alloy ta...

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Bibliographic Details
Main Authors HUANG, TIEN-WANG, CHANG, YIH, CHAO, CHIH-HSIAO, CHANG, JIINYUAN, CHEN, HUNG-HUA
Format Patent
LanguageChinese
English
Published 16.09.2006
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Summary:An alloy target for conductive film or its protection layer comprises copper (Cu), nickel (Ni) and zinc (Zn), wherein copper is about 50 to 80 weight percentages, nickel is about 5 to 20 weight percentages and zinc is about 15 to 30 weight percentages and the total weight percentages of the alloy target is 100%.
Bibliography:Application Number: TW200594106124