Device for measuring sub-nanometer displacement and method for signal processing

An apparatus for nano-scale displacement measurement and a signal processing method for increasing measurement bandwidth. The apparatus consists of a modified laser pickup head and a piezo actuator. In order to oscillate lens horizontally at a carrier frequency, a piezo actuator was employed to gene...

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Bibliographic Details
Main Authors KUO, SHIH-KANG, HUNG, CHUANNG, LIN, CHANGING, YEH, KOUNG-MING
Format Patent
LanguageChinese
English
Published 01.06.2006
Subjects
INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
PHYSICS
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Summary:An apparatus for nano-scale displacement measurement and a signal processing method for increasing measurement bandwidth. The apparatus consists of a modified laser pickup head and a piezo actuator. In order to oscillate lens horizontally at a carrier frequency, a piezo actuator was employed to generate high frequency oscillation. A parallel linkage is used to support the lens and to amplify the vibration from the piezo actuator. To compensate signal distortion due to tilt angle of lens, a mechanism is mounted on the back of the apparatus is used for tilt adjustment. Additionally, two signals, focus error signal and tracking error signal are employed to improve the measurement bandwidth.
Bibliography:Application Number: TW20040136590