Wafer pod and positioner therein

A wafer pod and positioner therein is disclosed. The positioner with a dropping direction comprises a frame, two positing portions, a plurality of ribs, at least two rod-holding portions, and at least two rods. The frame has a plane. The positing portions are disposed on the two sides of frame that...

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Bibliographic Details
Main Authors TSENG, YAO-FENG, SHEN, ANTHONG, CHANG, GREG, YANG, KENNY
Format Patent
LanguageChinese
English
Published 16.05.2005
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A wafer pod and positioner therein is disclosed. The positioner with a dropping direction comprises a frame, two positing portions, a plurality of ribs, at least two rod-holding portions, and at least two rods. The frame has a plane. The positing portions are disposed on the two sides of frame that parallel mutually and have a posting surface respectively. The ribs are disposed on the plane of frame and connect to the two positing portions. The laterals of ribs perpendicular to the dropping direction are tilling surface. The rod-holding portions are disposed on the frame and have a through hole passes through the rod-holding portions on the wafer-contacting surface of each rod-holding portion respectively. Each of the rods has a pivotally connecting portion for pivotally connecting to the corresponding rod-holding portion and pivotally connects to the sidewall of wafer pod's cover. The pivotally connecting portions pivotally connect to the rod-holding portions in pluralities of points respectively.
Bibliography:Application Number: TW20030131478