Industrial robot

The object of the present invention is to provide an industrial robot. The robot that is arranged in a cleaning room to perform duties can detect the amount of micro-particles in the cleaning room in a high precision and efficient manner. To solve the problem, a light scattering type micro-particle...

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Bibliographic Details
Main Authors HIDEYUKI, KONDO, HIROTO, NAKAJIMA, HARUHIRO, THUNETA, KAZUYOSHI, YASUKAWA, NAGASAWA YOSHIMI, TAKAYUKI, YAZAWA, NAKAJIMA HIROTO
Format Patent
LanguageChinese
English
Published 01.06.2004
Subjects
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
HAND TOOLS
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MANIPULATORS
MEASURING
PERFORMING OPERATIONS
PHYSICS
PORTABLE POWER-DRIVEN TOOLS
TESTING
TRANSPORTING
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Summary:The object of the present invention is to provide an industrial robot. The robot that is arranged in a cleaning room to perform duties can detect the amount of micro-particles in the cleaning room in a high precision and efficient manner. To solve the problem, a light scattering type micro-particle counter is mounted on a manipulator of the industrial robot for detecting the amount of the micro-particles inside the cleaning room. The intake opening of the counter is arranged at a tip of the manipulator. The laser beam employed in the micro-particle counter comprises a strap-shaped laser beam.
Bibliography:Application Number: TW200392130201