Reflection type electro-optic device and electronic machine

• Main Author: AKIRA, FUTAMURA
• Format: Patent
• Language: Chinese; English
• Published: 16.08.2003
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

The subject of the present invention is to provide a reflection type electro-optic device and electronic machine, in which the lower side state of the protrusion-recess forming layer is uniform, and the protrusion-recess shape will not generate non-uniformity when the protrusion-recess forming layer is formed by photolithography technology. The solution is to proceed semi-exposure, developing and heating the photosensitive resin (13) to form the protrusion-recess forming layer (13a) in which the protrusion-recess pattern (8g) is made on the reflection film (8a). Since the height different and sectional difference can be cancelled by the height different film (3f) on the lower layer side of the protrusion-recess forming layer (13a), the photosensitive resin (13) can be well exposed. Also, since the height difference is cancelled, the thickness deviation of the photosensitive resin (13) is little, the deviation of the protrusion-recess shape is little.