Process for the manufacture of a micromachines device to contain or convey a fluid

• Main Authors: SCHOOT VAN DER BART, JEANNERT SYLVAIN, ROOIJ DE NICOLAS FRANS, VOLKER GASS
• Format: Patent
• Language: English
• Published: 20.03.1998
• Edition: 6
• Subjects: BABY COMFORTERS; BASIC ELECTRIC ELEMENTS; BLASTING; CONTAINERS SPECIALLY ADAPTED FOR MEDICAL OR PHARMACEUTICALPURPOSES; DEVICES FOR ADMINISTERING FOOD OR MEDICINES ORALLY; DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR; DEVICES FOR RECEIVING SPITTLE; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROMTHE BODY; DEVICES OR METHODS SPECIALLY ADAPTED FOR BRINGINGPHARMACEUTICAL PRODUCTS INTO PARTICULAR PHYSICAL ORADMINISTERING FORMS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HEATING; HUMAN NECESSITIES; HYGIENE; LIGHTING; MECHANICAL ENGINEERING; MEDICAL OR VETERINARY SCIENCE; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; SEMICONDUCTOR DEVICES; WEAPONS

This process consists of machining a silicon piece (4) by means of selective oxidation operations and photolithography to form therein at least one cavity (7, 12) adapted to contain or convey a fluid, and of oxidizing the wall of the cavity to make this hydrophilic. The device is completed by fixing closing plates (1, 5) to its body thus formed. Prior to the machining operations the surfaces of the piece (4) adapted to be in contact with the closing plates (1, 5) are covered with a screening layer that resists these machining operations. Then, after these have been completed, the surfaces of the piece intended to be exposed to the fluid are oxidized to form therein an oxide layer favoring the wettability of these surfaces. The screening layer is then removed and the closing plates are fixed to the piece. The invention has applications, notably in micropumps.