SEMICONDUCTOR DEVICE AND METHOD OF FORMING CONDUCTIVE PILLAR HAVING AN EXPANDED BASE
Abstract SEMICONDUCTOR DEVICE AND METHOD OFFORMING CONDUCTIVE PILLAR HAVING AN EXPANDED BASEA semiconductor device has a first semiconductor die and conductive vias in the first semiconductor die. The conductive vias can be formed by extending the vias partially through a first surface of the first...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
31.05.2013
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Subjects | |
Online Access | Get full text |
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Summary: | Abstract SEMICONDUCTOR DEVICE AND METHOD OFFORMING CONDUCTIVE PILLAR HAVING AN EXPANDED BASEA semiconductor device has a first semiconductor die and conductive vias in the first semiconductor die. The conductive vias can be formed by extending the vias partially through a first surface of the first semiconductor die. A portion of a second surface of the first semiconductor die is removed to expose the conductive vias. A plurality of conductive pillars is formed over the first surface the first semiconductor die. The conductive pillars include an expanded base electrically connected to the conductive vias. A width of the expanded base of the conductive pillars is greater than a width of a body of the conductive pillars. A conductive layer is formed over a second surface of the first semiconductor die. The conductive layer is electrically connected to the conductive vias. A second semiconductor die is mounted to the first semiconductor die with a second conductive pillar having an expanded base. (Fig. 4) |
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Bibliography: | Application Number: SG20120072138 |