METHOD FOR FABRICATING NANO-DEVICES

Embodiments relate to a method for fabricating nano-wires in nano-devices, and more particularly to nano-device fabrication using end-of- n.ge (EOR) defects, hi one embodiment, a substrate with a surface crystalline layer over the substrate is provided and FOR dercets are created in the surface crys...

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Main Authors PEY KIN LEONG, CHIN YOKE KING, ONG KUANG KIAN, DEXTER TAN, NG CHEE MANG, YEONG SAI HOOI
Format Patent
LanguageEnglish
Published 28.02.2012
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Summary:Embodiments relate to a method for fabricating nano-wires in nano-devices, and more particularly to nano-device fabrication using end-of- n.ge (EOR) defects, hi one embodiment, a substrate with a surface crystalline layer over the substrate is provided and FOR dercets are created in the surface crystalline layer. One or more fins with EOR defects embedded within is formed and oxidized to form one or ore fully oxidized nano-wires with nano-crystals within the core of the nan.o-wire. Fig. 1
Bibliography:Application Number: SG20110049350