GAS SHOWER, LITHOGRAPHIC APPARATUS AND USE OF A GAS SHOWER

A gas shower to condition at least one optical path in an optical apparatus, wherein the gas shower includes a gas distribution chamber having a shower outlet side to supply gas to the optical path, the gas distribution chamber being configured to distribute the gas to the optical path, wherein the...

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Bibliographic Details
Main Authors ROSET, NIEK JACOBUS JOHANNES, VAN EMPEL, TJARKO ADRIAAN RUDOLF, VAN DER HAM, RONALD
Format Patent
LanguageEnglish
Published 28.05.2007
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Summary:A gas shower to condition at least one optical path in an optical apparatus, wherein the gas shower includes a gas distribution chamber having a shower outlet side to supply gas to the optical path, the gas distribution chamber being configured to distribute the gas to the optical path, wherein the gas distribution chamber includes a substantially sharp tapered tip.
Bibliography:Application Number: SG20060073258