METHOD FOR REMOVING ORGANIC ELECTROLUMINESCENT RESIDUES FROM A SUBSTRATE

Organic electroluminescent residues are removed from a substrate by reactive species generated by activation in a remote chamber of a process gas comprising a fluorine-containing gas.

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Bibliographic Details
Main Authors PLISHKA MARTIN JAY, MAROULIS PETER JAMES, SISTERN MARK IAN, JOHNSON ANDREW DAVID
Format Patent
LanguageEnglish
Published 26.04.2007
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Summary:Organic electroluminescent residues are removed from a substrate by reactive species generated by activation in a remote chamber of a process gas comprising a fluorine-containing gas.
Bibliography:Application Number: SG20060064588