INGOT PULLER APPARATUS THAT INCLUDE A DOPING CONDUIT WITH A POROUS PARTITION MEMBER FOR SUBLIMING SOLID DOPANT

Ingot puller apparatus for preparing silicon ingots that include a dopant feed system are disclosed. The dopant feed system include a dopant conduit having a porous partition member disposed across the dopant conduit. Solid dopant falls onto the partition member where it sublimes. The sublimed dopan...

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Bibliographic Details
Main Authors BATTAN, Franco, HARINGER, Stephan, SCALA, Roberto
Format Patent
LanguageEnglish
Published 29.06.2021
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Summary:Ingot puller apparatus for preparing silicon ingots that include a dopant feed system are disclosed. The dopant feed system include a dopant conduit having a porous partition member disposed across the dopant conduit. Solid dopant falls onto the partition member where it sublimes. The sublimed dopant is carried by inert gas through the partition member to contact and dope the silicon melt.
Bibliography:Application Number: SG20211105783Y