SYSTEM FOR FORMING NANO-LAMINATE OPTICAL COATING

• Main Authors: BLUCK, Terry, BLONIGAN, Wendell Thomas
• Format: Patent
• Language: English
• Published: 27.02.2020
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) vitivio VIII oviolo itio Hs (19) World Intellectual Property Organization International Bureau (10) International Publication Number WO 2019/018698 Al (43) International Publication Date 24 January 2019 (24.01.2019) WIP0 I PCT (51) International Patent Classification: (71) Applicant: INTEVAC, INC. [US/US]; 3560 Bassett C23C 14/06 (2006.01) C23C 14/24 (2006.01) Street, Santa Clara, California 95054 (US). C23C 14/08 (2006.01) C23C 14/34 (2006.01) C23C 14/10 (2006.01) C23C 14/56 (2006.01) (72) Inventors: BLUCK, Terry; 3128 Butte Street, Santa Clara, California 95051 (US). BLONIGAN, Wendell Thomas; (21) International Application Number: 8137 War Glory Place, Pleasanton, California 94566 (US). PCT/US2018/042971 (74) Agent: BACH, Joseph; WOMBLE BOND DICKINSON (US) LLP, P.O. Box 7037, Atlanta, Georgia 30357-0037 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, (22) International Filing Date: 19 July 2018 (19.07.2018) English English (25) Filing Language: (26) Publication Language: (30) Priority Data: 62/534,438 19 July 2017 (19.07.2017) US 62/651,617 02 April 2018 (02.04.2018) US (54) Title: SYSTEM FOR FORMING NANO-LAMINATE OPTICAL COATING 413 Figure 4A (57) : A processing system for forming an optical coating on a substrate is provided, wherein the optical coating including an anti-reflective coating and an oleophobic coating, the system comprising: a linear transport processing section configured for processing and transporting substrate carriers individually and one at a time in a linear direction; at least one evaporation processing system positioned in the linear transport processing system, the evaporation processing system configured to form the oleophobic coating; a batch processing section configured to transport substrate carriers in unison about an axis; at least one ion beam assisted deposition processing chamber positioned in the batch processing section, the ion beam assisted deposition processing chamber configured to deposit layer of the anti-reflective coating; a plurality of substrate carriers for mounting substrates; and, means for transferring the substrate carriers between the linear transport processing section and the batch processing section without exposing the substrate carrier [Continued on next page] WO 2019/018698 Al MIDEDIMOMOIDEIRMEI00 IIMOHEIHMOMEM1011 OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: - with international search report (Art. 21(3)) to atmosphere.