VISIBLE ALIGNMENT MARKERS/LANDMARKS FOR CAD-TO-SILICON BACKSIDE IMAGE ALIGNMENT

• Main Authors: SALEM, Rami, RANGANATHAN, Lavakumar, MALABRY, Mickael, LIM, Hyeokjin, BUNNALIM, Hadi, ENDRINAL, Lesly Zaren V, KIM, Robert
• Format: Patent
• Language: English
• Published: 29.04.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A MOS IC includes a first standard cell including first and second power rails, first and second active regions, and a plurality of metal interconnects. The first power rail extends in a first direction and provides a first voltage to the first standard cell. The second power rail extends in the first direction and provides a second voltage to the first standard cell. The first active region is between the first and second power rails on a first side of the first standard cell. The second active region is between the first and second power rails on a second side of the first standard cell. The second active region is separated from the first active region. The plurality of metal interconnects extend in a second direction between the first and second active regions and between the first and second power rails. The second direction is orthogonal to the first direction.