BEAM DELIVERY APPARATUS AND METHOD

• Main Authors: LOOPSTRA, ERIK, FRIJNS, OLAV, NIENHUYS, HAN-KWANG, NIKIPELOV, ANDREY, KRUIZINGA, BORGERT, RENKENS, MICHAEL, AMENT, LUCAS, DONKER, RILPHO, DE VRIES, GOSSE, VAN GORKOM, RAMON, DE JAGER, PIETER, ENGELEN, WOUTER, BANINE, VADIM, GRIMMINCK, LEONARDUS, KATALENIC, ANDELKO, BARTRAIJ, PETRUS, JANSSEN, FRANCISCUS
• Format: Patent
• Language: English
• Published: 30.03.2016
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; DEVICES USING STIMULATED EMISSION; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; GAMMA RAY OR X-RAY MICROSCOPES; HOLOGRAPHY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; IRRADIATION DEVICES; MATERIALS THEREFOR; MEASURING; NUCLEAR ENGINEERING; NUCLEAR PHYSICS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR; TESTING

A delivery system for use within a lithographic system. The beam delivery system comprises optical elements arranged to receive a radiation beam from a radiation source and to reflect portions of radiation along one or more directions to form a one or more branch radiation beams for provision to one or more tools.