PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

• Main Authors: HANDA, TATSUYA, NIYA, TETSUYA, KOBAYASHI, KEIGO, MIDORIKAWA, RYOTARO, NAGAYAMA, NOBUYUKI, MAKABE, MASATSUGU, NISHINO, MASARU
• Format: Patent
• Language: English
• Published: 30.10.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

A plasma processing apparatus includes a processing chamber; a lower electrode serving as a mounting table for mounting thereon a target object; and an upper electrode or an antenna electrode provided to be opposite to the lower electrode. The apparatus further includes a gas supply source for introducing a gas including a halogen-containing gas and an oxygen gas into the processing chamber and a high frequency power supply for applying a high frequency power for generating plasma to at least one of the upper electrode, the antenna electrode, or the lower electrode. Among inner surfaces of the processing chamber which are exposed to the plasma, at least a part of or all of the surfaces between a mounting position of the target object and the upper electrode, or the antenna electrode; or at least a part of or all of the surfaces of the upper electrode or the antenna electrode are coated with a fluorinated compound.