B2F4 MANUFACTURING PROCESS

A reaction system and method for preparing compounds or intermediates from solid reactant materials is provided. In a specific aspect, a reaction system and methods are provided for preparation of boron-containing precursor compounds useful as precursors for ion implantation of boron in substrates....

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Main Authors JONES, EDWARD E, SWEENEY, JOSEPH D, PYDI, CHIRANJEEVI, BYL, OLEG
Format Patent
LanguageEnglish
Published 30.05.2016
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Summary:A reaction system and method for preparing compounds or intermediates from solid reactant materials is provided. In a specific aspect, a reaction system and methods are provided for preparation of boron-containing precursor compounds useful as precursors for ion implantation of boron in substrates. In another specific aspect, a reactor system and methods are provided for manufacture of boron precursors such as B2F4.
Bibliography:Application Number: SGX10201602816