CAROUSEL REACTOR FOR MULTI-STATION, SEQUENTIAL PROCESSING SYSTEMS

A reactor for processing a plurality of substrates includes P processing station assemblies arranged symmetrically around an axis, where P is an integer greater than one. A pedestal carousel assembly includes P pedestal assemblies arranged symmetrically around the axis, each of the P pedestal assemb...

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Bibliographic Details
Main Author KARL LEESER
Format Patent
LanguageEnglish
Published 27.11.2015
Online AccessGet full text

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