CAROUSEL REACTOR FOR MULTI-STATION, SEQUENTIAL PROCESSING SYSTEMS
A reactor for processing a plurality of substrates includes P processing station assemblies arranged symmetrically around an axis, where P is an integer greater than one. A pedestal carousel assembly includes P pedestal assemblies arranged symmetrically around the axis, each of the P pedestal assemb...
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Main Author | |
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Format | Patent |
Language | English |
Published |
27.11.2015
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Online Access | Get full text |
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Summary: | A reactor for processing a plurality of substrates includes P processing station assemblies arranged symmetrically around an axis, where P is an integer greater than one. A pedestal carousel assembly includes P pedestal assemblies arranged symmetrically around the axis, each of the P pedestal assemblies including a pedestal. A rotational actuator rotates the pedestal carousel assembly relative to the axis to selectively index the P pedestal assemblies with the P processing station assemblies. Each of the P processing station assemblies processes substrates arranged on corresponding ones of the P pedestal assemblies at the same time. |
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Bibliography: | Application Number: SG20151008442U |