METHOD FOR NITRIDING OF OXIDE COMPOUNDS IN A SOLID PHASE

• Main Authors: Muslimov Arsen Emirbegovich, Kanevskij Vladimir Mikhajlovich, Tyuftyaev Aleksandr Semenovich, Butashin Andrej Viktorovich, Gadzhiev Makhach Khajrudinovich
• Format: Patent
• Language: English; Russian
• Published: 03.02.2020
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

FIELD: technological processes.SUBSTANCE: invention relates to the field of thermo-chemical treatment of materials. Method of plasma nitriding of silicon oxide in a solid phase in a controlled medium involves exposure of the said silicon oxide to low-temperature nitrogen plasma at atmospheric pressure for 7-10 seconds. Low-temperature nitric plasma is generated by direct-current plasmatron with mass-average temperature of plasma flow 7÷10 kK.EFFECT: considerable reduction of the period of nitration of zinc oxide in the solid phase, approximately by 3 orders, and obtaining of high performance characteristics of oxide compounds.1 cl, 1 dwg Изобретение относится к области термо-химической обработки материалов. Способ плазменного азотирования оксида кремния в твердой фазе в контролируемой среде включает воздействие на упомянутый оксид кремния низкотемпературной азотной плазмой при атмосферном давлении в течение 7-10 секунд. Низкотемпературную азотную плазму генерируют плазмотроном постоянного тока со среднемассовой температурой плазменного потока 7÷10 кK. Обеспечивается значительное уменьшение, примерно на 3 порядка, времени азотирования оксида цинка в твердой фазе и получение высоких эксплуатационных характеристик оксидных соединений. 1 ил..