SENSOR AND SYSTEM FOR MEASURING ELECTRON BEAM

FIELD: physics. ^ SUBSTANCE: invention relates to a sensor (10) for measuring intensity of an electron beam, formed by an electron beam generator along a path in the direction of a target, lying in the region of the target, where the electron beam is excited by the generator through an output window...

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Bibliographic Details
Main Authors KRISTIANSSON ANDERS, KHALLSTADIUS KHANS, KHAAG VERNER, TSIGERLIG BENNO, NESLUND LARS OKE, KHOL'M KURT
Format Patent
LanguageEnglish
Russian
Published 10.06.2011
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