METHOD FOR PROCESSING MAGNETO-OPTICAL SPATIAL-LIGHT MODULATORS BUILT AROUND EPITAXIAL FERRITE-GARNET FILMS

magnetic microelectronics. SUBSTANCE: method used for processing single-crystalline epitaxial Bi- and Ga-containing ferrite- garnet films and devices built around them involves irradiation of spatial- light modulators with fast electrons of energy Ee= (4÷7) MeV at flux density e= (2÷6).1012 cm-2s-1...

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Bibliographic Details
Main Authors KOSTISHIN V.G, LADYGIN E.A, LETJUK L.M, ZOTOVA E.A
Format Patent
LanguageEnglish
Published 10.06.2000
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:magnetic microelectronics. SUBSTANCE: method used for processing single-crystalline epitaxial Bi- and Ga-containing ferrite- garnet films and devices built around them involves irradiation of spatial- light modulators with fast electrons of energy Ee= (4÷7) MeV at flux density e= (2÷6).1012 cm-2s-1 up to fluency Φe= (1÷5).1016 cm-2, irradiation being conducted throughout entire modulator surface and on its non-effective side; then they are annealed in oxygen environment at 150-300 C for 1-2 h. EFFECT: reduced spread of cell change-over threshold fields and increased speed of magnetrons. 2 dwg, 3 ex
Bibliography:Application Number: RU19990109227