TRICHLOROSILANE PRODUCTION PROCESS

• Main Authors: BORISOVA L.A, MURAVITSKIJ S.A, KUCHUMOV B.M, KUKSANOV N.K, REZNICHENKO M.F, KORCHAGIN A.I, KUZNETSOV F.A, LAVRUKHIN A.V
• Format: Patent
• Language: English
• Published: 10.04.2000
• Edition: 7
• Subjects: CHEMISTRY; COMPOUNDS THEREOF; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS

FIELD: silicon compounds technology. SUBSTANCE: process involves activation of silicon tetrachloride-hydrogen interaction by high-energy (0.5-2.5 MeV) electron beam in flow-type reactor containing tetrachloride-hydrogen gas-vapor mixture or any worked-out gas-vapor mixtures containing silicon tetrac...