TRICHLOROSILANE PRODUCTION PROCESS

FIELD: silicon compounds technology. SUBSTANCE: process involves activation of silicon tetrachloride-hydrogen interaction by high-energy (0.5-2.5 MeV) electron beam in flow-type reactor containing tetrachloride-hydrogen gas-vapor mixture or any worked-out gas-vapor mixtures containing silicon tetrac...

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Main Authors BORISOVA L.A, MURAVITSKIJ S.A, KUCHUMOV B.M, KUKSANOV N.K, REZNICHENKO M.F, KORCHAGIN A.I, KUZNETSOV F.A, LAVRUKHIN A.V
Format Patent
LanguageEnglish
Published 10.04.2000
Edition7
Subjects
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Abstract FIELD: silicon compounds technology. SUBSTANCE: process involves activation of silicon tetrachloride-hydrogen interaction by high-energy (0.5-2.5 MeV) electron beam in flow-type reactor containing tetrachloride-hydrogen gas-vapor mixture or any worked-out gas-vapor mixtures containing silicon tetrachloride. EFFECT: reduced power consumption. 2 cl, 4 ex
AbstractList FIELD: silicon compounds technology. SUBSTANCE: process involves activation of silicon tetrachloride-hydrogen interaction by high-energy (0.5-2.5 MeV) electron beam in flow-type reactor containing tetrachloride-hydrogen gas-vapor mixture or any worked-out gas-vapor mixtures containing silicon tetrachloride. EFFECT: reduced power consumption. 2 cl, 4 ex
Author MURAVITSKIJ S.A
BORISOVA L.A
REZNICHENKO M.F
LAVRUKHIN A.V
KUKSANOV N.K
KORCHAGIN A.I
KUZNETSOV F.A
KUCHUMOV B.M
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– fullname: KORCHAGIN A.I
– fullname: KUZNETSOV F.A
– fullname: LAVRUKHIN A.V
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INSTITUT NEORGANICHESKOJ KHIMII SO RAN
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Snippet FIELD: silicon compounds technology. SUBSTANCE: process involves activation of silicon tetrachloride-hydrogen interaction by high-energy (0.5-2.5 MeV) electron...
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COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
Title TRICHLOROSILANE PRODUCTION PROCESS
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