DEVICE FOR FINE CONTROL OF MICRO-PORTION

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Bibliographic Details
Main Authors CHUVAKOV VIKTOR A,SU, KUZNETSOV YURIJ P,SU
Format Patent
LanguageEnglish
Published 23.12.1992
Subjects
CONTROLLING
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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Bibliography:Application Number: SU19904879825