PROCESS FOR MANUFACTURING NANOWIRE ARRAYS OF CORE-SHELL TYPE BASED ON COPPER OXIDE AND TITANIUM DIOXIDE

• Main Authors: ZGURA IRINA-IONELA, COSTAS LILIANA-ANDREEA, ENCULESCU MARIA-MONICA, ENCULESCU IONUŢ-MARIUS, PREDA NICOLETA-ROXANA, FLORICA CAMELIA-FLORINA
• Format: Patent
• Language: English; Romanian
• Published: 29.04.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MANUFACTURE OR TREATMENT THEREOF; METALLURGY; NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS; NANOTECHNOLOGY; PERFORMING OPERATIONS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

The invention relates to a process for manufacturing CuO and TiO2 nanowire arrays of core-shell type on the surface of Cu foils, the semiconductor nanowires having applications in the development of new power-generating electronic devices, photodetectors, light emitting diodes, photocatalysis, microanalysis, gas sensors and other similar fields. According to the invention, the process consists in combining two methods: thermal oxidation in air which takes place in a convection furnace, in the presence of the oxygen in the air, at atmospheric pressure, at a temperature of 500°C, for 12 hours, followed by cathode sputtering with magnetron in radio frequency RF, performed in an atmosphere of N2, at a deposition pressure of 4x1010-3mbar, the power applied onto the magnetron being of 200 W, and the deposition time being changed from 26 minutes to 52 minutes and then to 78 minutes, in order to obtain three different thicknesses for the TiO2 film, namely of 10 nm, 20 nm and 30 nm, where other semiconductor combinations can be also used for making the nanowire arrays, such as: Cu - ZnO, CuO - WO3, ZnO - CuO, ZnO - WO3 and ZnO - TiO2. Invenţia se referă la un procedeu de obţinere a unor matrici de nanofire de tip miez - coajă CuO şi TiO2 pe suprafaţa unor folii de Cu, nanofirele semiconductoare având aplicaţii în dezvoltarea noilor dispozitive electronice generatoare de energie, fotodetectori, diode electroluminiscente, fotocataliza, microanaliza, senzori de gaze şi alte domenii asemenea. Procedeul conform invenţiei constă în combinarea a două metode: oxidarea termică în aer care are loc într-un cuptor cu convecţie, în prezenţa oxigenului din aer, la presiune atmosferică, la o temperatură de 500°C timp de 12 ore, urmată de pulverizarea catodică cu magnetron în radiofrecvenţă RF realizată într-o atmosferă de N2, la o presiune de depunere de 4 x 1010-3 mbar, puterea aplicată pe magnetron fiind de 200 w, iar timpul de depunere este modificat de la 26 minute la 52 minute şi la 78 minute, pentru a putea obţine trei grosimi diferite a filmului de TiO2, de 10 nm, 20 nm şi respectiv 30 nm, pentru obţinerea matricilor de nanofire putând fi utilizate şi alte combinaţii de semiconductori ca de exemplu: Cu - ZnO, CuO - WO3, ZnO - CuO, ZnO - WO3 şi ZnO - TiO2.