Quantum computing apparatus with interposer, method of fabrication thereof, method of performing a quantum computing operation, quantum computing apparatus comprising tantalum nitride and a method of fabrication thereof

• Main Authors: ALESSANDRO BRUNO, MATTHIJS RIJLAARSDAM, SOPHIA VLAAR
• Format: Patent
• Language: English
• Published: 18.08.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS; COMPUTING; COUNTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PHYSICS; SEMICONDUCTOR DEVICES

The present invention discloses a quantum computing apparatus, comprising a substrate layer, a patterned layer adjacent and parallel to the substrate layer such that the substrate layer and the patterned layer form a layer stack. The patterned layer comprises an electrical conductive material and forms at least part of one quantum computing circuit component. The quantum computing apparatus further comprises an interposer comprising a substantially rigid connection element mechanically connected to the layer stack and positioned in a non- parallel plane, preferably being substantially orthogonal, to the plane in which the substrate layer is formed. A conductive element is formed on or in the connection element, preferably a transmission line, for providing an electrical connection to the patterned layer.