OBJECT TABLE, STAGE APPARATUS, HOLDING METHOD AND LITHOGRAPHIC APPARATUS
The invention provides an object table comprising: - a holding surface for holding an object; - an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface; whereby the actuator arrangement is further configured to decrease a strain in the ob...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
16.06.2022
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Subjects | |
Online Access | Get full text |
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Abstract | The invention provides an object table comprising: - a holding surface for holding an object; - an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface; whereby the actuator arrangement is further configured to decrease a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface. |
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AbstractList | The invention provides an object table comprising: - a holding surface for holding an object; - an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface; whereby the actuator arrangement is further configured to decrease a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface. |
Author | ANDRE BERNARDUS JEUNINK MICHAEL MARINUS ANNA STEUR BAS JANSEN JOHANNES ADRIANUS CORNELIS MARIA PIJNENBURG |
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Snippet | The invention provides an object table comprising: - a holding surface for holding an object; - an actuator arrangement configured to exert a holding force on... |
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SubjectTerms | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
Title | OBJECT TABLE, STAGE APPARATUS, HOLDING METHOD AND LITHOGRAPHIC APPARATUS |
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