OBJECT TABLE, STAGE APPARATUS, HOLDING METHOD AND LITHOGRAPHIC APPARATUS

The invention provides an object table comprising: - a holding surface for holding an object; - an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface; whereby the actuator arrangement is further configured to decrease a strain in the ob...

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Bibliographic Details
Main Authors ANDRE BERNARDUS JEUNINK, JOHANNES ADRIANUS CORNELIS MARIA PIJNENBURG, BAS JANSEN, MICHAEL MARINUS ANNA STEUR
Format Patent
LanguageEnglish
Published 16.06.2022
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:The invention provides an object table comprising: - a holding surface for holding an object; - an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface; whereby the actuator arrangement is further configured to decrease a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface.
Bibliography:Application Number: NL20212029255