PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS
A pellicle membrane for a lithographic apparatus, said membrane comprising uncapped carbon nanotubes is provided. Also provided is a method of regenerating a pellicle membrane, said method comprising decomposing a precursor compound and depositing at least some of the products of decomposition onto...
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Main Authors | , , , , , , , , , , , , |
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Format | Patent |
Language | English |
Published |
14.10.2021
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Subjects | |
Online Access | Get full text |
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