Method for recording and correlating light and charged particle microscopy images

The invention relates to a method for recording and correlating light and charged particle microscopy images of a sample or one of more sections of a sample, wherein the method comprises the steps of: recording a light microscopy image of a first field of view; recording a first charged particle mic...

Full description

Saved in:
Bibliographic Details
Main Authors RYAN IRWIN LANE, JACOB PIETER HOOGENBOOM, ADITI SRINIVASA RAJA, SANDER DEN HOEDT
Format Patent
LanguageEnglish
Published 13.09.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
Online AccessGet full text

Cover

More Information
Summary:The invention relates to a method for recording and correlating light and charged particle microscopy images of a sample or one of more sections of a sample, wherein the method comprises the steps of: recording a light microscopy image of a first field of view; recording a first charged particle microscopy image of a second field of view at least partially overlapping with the first field of view, wherein the first charged. particle microscopy image has a first magnification; recording' multiple second. charged. particle microscopy images of third fields of view, wherein each of the multiple second charged particle microscopy images has a second magnification which is higher than the first magnification, and wherein the third fields of view are sub- fields of the second field of view; registering the light microscopy image to the first charged particle microscopy image; and registering the multiple second charged particle microscopy images to the first charged particle microscopy image.
Bibliography:Application Number: NL20202024861