A Process Tool and an Inspection Method
A process tool for processing production substrates, the process tool comprising: a movable stage configured to perform long-stroke movements in an X-Y plane; a component to be inspected; an imaging device mounted to a fixed part of the tool and having an optical axis substantially parallel to the X...
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| Main Authors | , , , , |
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| Format | Patent |
| Language | English |
| Published |
25.09.2019
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| Subjects | |
| Online Access | Get full text |
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| Abstract | A process tool for processing production substrates, the process tool comprising: a movable stage configured to perform long-stroke movements in an X-Y plane; a component to be inspected; an imaging device mounted to a fixed part of the tool and having an optical axis substantially parallel to the X-Y plane; and a mirror mounted on the movable stage and oriented at a predetermined angle of inclination to the X-Y plane so that by moving the movable stage to a predetermined position a part of the component can be imaged by the imaging device. |
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| AbstractList | A process tool for processing production substrates, the process tool comprising: a movable stage configured to perform long-stroke movements in an X-Y plane; a component to be inspected; an imaging device mounted to a fixed part of the tool and having an optical axis substantially parallel to the X-Y plane; and a mirror mounted on the movable stage and oriented at a predetermined angle of inclination to the X-Y plane so that by moving the movable stage to a predetermined position a part of the component can be imaged by the imaging device. |
| Author | CHRISTIANUS WILHELMUS JOHANNES BERENDSEN RAPHAEL NICO JOHAN STEGEN GIOVANNI LUCA GATTOBIGIO ERIK HENRICUS EGIDIUS CATHARINA EUMMELEN THEODORUS WILHELMUS POLET |
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| Snippet | A process tool for processing production substrates, the process tool comprising: a movable stage configured to perform long-stroke movements in an X-Y plane;... |
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| SubjectTerms | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES |
| Title | A Process Tool and an Inspection Method |
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