A Process Tool and an Inspection Method

A process tool for processing production substrates, the process tool comprising: a movable stage configured to perform long-stroke movements in an X-Y plane; a component to be inspected; an imaging device mounted to a fixed part of the tool and having an optical axis substantially parallel to the X...

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Bibliographic Details
Main Authors CHRISTIANUS WILHELMUS JOHANNES BERENDSEN, THEODORUS WILHELMUS POLET, RAPHAEL NICO JOHAN STEGEN, ERIK HENRICUS EGIDIUS CATHARINA EUMMELEN, GIOVANNI LUCA GATTOBIGIO
Format Patent
LanguageEnglish
Published 25.09.2019
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:A process tool for processing production substrates, the process tool comprising: a movable stage configured to perform long-stroke movements in an X-Y plane; a component to be inspected; an imaging device mounted to a fixed part of the tool and having an optical axis substantially parallel to the X-Y plane; and a mirror mounted on the movable stage and oriented at a predetermined angle of inclination to the X-Y plane so that by moving the movable stage to a predetermined position a part of the component can be imaged by the imaging device.
Bibliography:Application Number: NL20192023716