APPARATUS FOR AND METHOD OF MONITORING AND CONTROLLING DROPLET GENERATOR PERFORMANCE

Apparatus for and method of controlling formation of droplets used to generate EUV radiation that comprise an arrangement producing a laser beam directed to an irradiation region and a droplet source. The droplet source includes a fluid exiting an nozzle and a sub-system 5 having an electro-actuatab...

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Bibliographic Details
Main Authors KOEN GERHARDUS WINKELS, DIETMAR UWE HERBERT TREES, ALEXANDER IGOREVICH ERSHOV, THEODORUS WILHELMUS DRIESSEN, GEORGIY O. VASCHENKO, BOB ROLLINGER
Format Patent
LanguageEnglish
Published 02.10.2019
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:Apparatus for and method of controlling formation of droplets used to generate EUV radiation that comprise an arrangement producing a laser beam directed to an irradiation region and a droplet source. The droplet source includes a fluid exiting an nozzle and a sub-system 5 having an electro-actuatable element producing a disturbance in the fluid. The droplet source produces a stream that breaks down into droplets that in turn coalesce into larger droplets as they progress towards the irradiation region. The process is controlled by obserVing the stream at a point Where droplets in the stream have not fully coalesced.
Bibliography:Application Number: NL20192022747