A METHOD FOR MANUFACTURING A MEMBRANE ASSEMBLY

A method for manufacturing a membrane assembly for EUV lithography, the method comprising: providing a stack comprising a membrane layer between a supporting substrate and an attachment substrate, wherein the supporting substrate comprises an inner region and a first border region; processing the st...

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Bibliographic Details
Main Authors SICCO OOSTERHOFF, PAUL JANSSEN, BEATRIJS LOUISE MARIE-JOSEPH KATRIEN VERBRUGGE
Format Patent
LanguageEnglish
Published 23.05.2017
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:A method for manufacturing a membrane assembly for EUV lithography, the method comprising: providing a stack comprising a membrane layer between a supporting substrate and an attachment substrate, wherein the supporting substrate comprises an inner region and a first border region; processing the stack, including selectively removing the inner region of the supporting substrate, to form a membrane assembly comprising: a membrane formed from at least the membrane layer; and a support holding the membrane, the support formed at least partially from the first border region of the supporting substrate. The attachment substrate can be bonded to the rest of the stack.
Bibliography:Application Number: NL20162017667