Target processing unit

• Main Authors: DAVID JOHANNES VAN DEN BERGEN, JOHAN JOOST KONING
• Format: Patent
• Language: English
• Published: 18.05.2016
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CINEMATOGRAPHY; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; MATERIALS THEREFOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PHYSICS; PRINTED CIRCUITS; THEIR RELEVANT APPARATUS; TRANSPORTING

The invention relates to a target processing unit (10), a vacuum chamber (30) and an intermediate conduit assembly (108). The target processing unit comprises an access port (36) for detachably connecting electronic equipment (22) and a connector panel ( 48) for detachably connecting one or more parts of a projection column (46), wherein the access port (36) is at least partly located outside of the target processing unit (10), and the connector panel (48) is located inside of the target processing unit (10). The access port (36) and the connector panel (48) are vibration/motion decoupled connected via one or more intermediate conduits (37). The access port (36), connector panel (48) and intermediate conduits (37) are parts of the intermediate conduit assembly (108).