Arrangement for the handling of a liquid metal for cooling revolving components of a radiation source based on a radiation-emitting plasma

An arrangement for handling a liquid metal for cooling revolving components of a plasma-based radiation source comprises a reservoir (221) of liquid metal (21) in a vessel (22), a tempering device (24) for adjusting the temperature moderately above the melting point of the metal (21), a pump unit (2...

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Bibliographic Details
Main Authors GOTA NIIMI, WILHELMUS VICTOR JOHANNES VAN NUNSPEET, PAULUS PETRUS MARIA BLOM
Format Patent
LanguageEnglish
Published 01.08.2016
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
X-RAY TECHNIQUE
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Summary:An arrangement for handling a liquid metal for cooling revolving components of a plasma-based radiation source comprises a reservoir (221) of liquid metal (21) in a vessel (22), a tempering device (24) for adjusting the temperature moderately above the melting point of the metal (21), a pump unit (23) for circulating the liquid metal (21), wherein a handling unit (2) is provided for transporting the metal (21) into a separated source module (1) via a feed pipe (3) and a return pipe (4) for guiding highly heated metal (21) back from the source module (1) into the reservoir (221), wherein the return pipe (4) is formed as a straight pipe slightly inclined to the reservoir (221) to guide the heated metal (21) back by action of gravity in a substantially laminar flow.
Bibliography:Application Number: NL20142012588