METHOD FOR PRODUCING POLISHING LIQUID COMPOSITION
Provided is a method for producing a polishing composition capable of reducing scratches and particles of an object to be polished, after polishing. It is a method for producing a polishing composition including a step of filtering with a filtration filter a silica particle dispersion containing col...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
20.05.2016
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Subjects | |
Online Access | Get full text |
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Summary: | Provided is a method for producing a polishing composition capable of reducing scratches and particles of an object to be polished, after polishing. It is a method for producing a polishing composition including a step of filtering with a filtration filter a silica particle dispersion containing colloidal silica whose primary particles have an average particle diameter in a range of 1 to 100 nm, wherein the filtration filter includes diatomite cationized by use of a polyvalent amine compound having 9 to 200 cationic groups in the molecule. |
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Bibliography: | Application Number: MY2013PI01064 |