METHOD FOR FORMING A COPPER WIRING PATTERN, AND COPPER OXIDE PARTICLE DISPERSED SLURRY USED THEREIN

• Main Authors: YAMAMOTO, KAZUNORI, MACHII, YOUICHI, YOKOZAWA, SHUNYA, MASUDA, KATSUYUKI, KUMASHIRO, YASUSHI, NAKAKO, HIDEO, EJIRI, YOSHINORI
• Format: Patent
• Language: English
• Published: 29.05.2015
• Subjects: BASIC ELECTRIC ELEMENTS; CABLES; CONDUCTORS; ELECTRICITY; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES

THERE ARE PROVIDED ARE A METHOD WHEREIN A SURFACE TREATING AGENT WHICH IS ESSENTIAL FOR MAKING COPPER PARTICLES ANTIOXIDATIVE AND DISPERSING THE COPPER PARTICLES IN THE PRIOR ART, IS HARDLY USED BUT COPPER PARTICLES, WHICH CAUSE LITTLE ELECTROMIGRATION AND ARE SMALL IN THE PRICE RATE OF MATERIAL ITSELF, ARE USED TO FORM A LOW-RESISTANCE COPPER WIRING PATTERN WHILE THE GENERATION OF CRACKS THEREIN IS RESTRAINED; AND A COPPER OXIDE PARTICLE DISPERSED SLURRY USED THEREIN.THE METHOD IS A METHOD FOR FORMING A COPPER WIRING PATTERN INCLUDING THE STEP OF USING A DISPERSION SLURRY WHEREIN COPPER BASED PARTICLES HAVING A COPPER OXIDE SURFACE ARE DISPERSED TO FORM ANY PATTERN OVER A SUBSTRATE, AND THE STEP OF REDUCING THE COPPER OXIDE SURFACE OF THE COPPER BASED PARTICLES IN THE PATTERN WITH ATOMIC FORM HYDROGEN TO RETURN THE OXIDE TO COPPER, AND SINTERING PARTICLES OF THE COPPER METAL GENERATED BY THE REDUCTION AND BONDING THE PARTICLES TO EACH OTHER.