POLISHING COMPOSITION

A POLISHING COMPOSITION FOR MEMORY HARD DISK CONTAINING WATER AND SILICA PARTICLES,WHEREIN THE SILICA PARTICLES HAVE A PARTICLE SIZE DISTRIBUTION IN WHICH THE RELATIONSHIP OF A PARTICLES SIZE (R) AND A CUMULATIVE VOLUME FREQUENCY (V) IN A GRAPH OF PARTICLE SIZE-CUMULATIVE VOLUME FREQUENCY OBTAINED B...

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Bibliographic Details
Main Authors TOSHIYA HAGIHARA, YOSHIAKI OSHIMA, KENICHI SUENAGA
Format Patent
LanguageEnglish
Published 30.04.2008
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Summary:A POLISHING COMPOSITION FOR MEMORY HARD DISK CONTAINING WATER AND SILICA PARTICLES,WHEREIN THE SILICA PARTICLES HAVE A PARTICLE SIZE DISTRIBUTION IN WHICH THE RELATIONSHIP OF A PARTICLES SIZE (R) AND A CUMULATIVE VOLUME FREQUENCY (V) IN A GRAPH OF PARTICLE SIZE-CUMULATIVE VOLUME FREQUENCY OBTAINED BY PLOTTING A CUMULATIVE VOLUME FREQUENCY (%) OF THE SILICA PARTICLES COUNTED FROM A SMALL PARTICLE SIZE SIDE AGAINST A PARTICLE SIZE (NM) OF THE SILICA PARTICLES IN THE RANGE OF PARTICLES SIZES OF FROM 40 TO 100 NM SATISFY THE FOLLOWING FORMULA (1): V > 0.5 X R + 40 (1), WHEREIN THE PARTICLES SIZE IS DETERMINED BY OBSERVATION WITH A TRANSMISSION ELECTRON MICROSCOPE (TEM). THE POLISHING COMPOSITION OF THE PRESENT INVENTION CAN BE EVEN MORE SUITABLY USED FOR THE MANUFACTURE OF A SUBSTRATE FOR PRECISION PARTS SUCH AS SUBSTRATES FOR MEMORY HARD DISKS.
Bibliography:Application Number: MY2003PI04719