POLISHING COMPOSITION

A POLISHING COMPOSITION FOR A SUBSTRATE FOR MEMORY HARD DISK, COMPRISING SILICA PARTICLES IN AN AQUEOUS MEDIUM, WHEREIN THE SILICA PARTICLES SATISFY A SPECIFIED RELATIONSHIP BETWEEN AN AVERAGE PARTICLE SIZE OF THE SILICA PARTICLES ON THE NUMBER BASIS AND A STANDARD DEVIATION ON THE NUMBER BASIS, WHE...

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Bibliographic Details
Main Authors TOSHIYA HAGIHARA, YOSHIAKI OSHIMA, KENICHI SUENAGA
Format Patent
LanguageEnglish
Published 29.12.2006
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Summary:A POLISHING COMPOSITION FOR A SUBSTRATE FOR MEMORY HARD DISK, COMPRISING SILICA PARTICLES IN AN AQUEOUS MEDIUM, WHEREIN THE SILICA PARTICLES SATISFY A SPECIFIED RELATIONSHIP BETWEEN AN AVERAGE PARTICLE SIZE OF THE SILICA PARTICLES ON THE NUMBER BASIS AND A STANDARD DEVIATION ON THE NUMBER BASIS, WHEREIN THE AVERAGE PARTICLE SIZE IS OBTAINED BY A DETERMINATION BY TRANSMISSION ELECTRON MICROSCOPE (TEM) OBSERVATION, AND WHEREIN A PARTICLE SIZE AND A CUMULATIVE VOLUME FREQUENCY IN A RANGE OF PARTICLE SIZES OF FROM 60 TO 120 NM SATISFIES A SPECIFIED RELATIONSHIP; A METHOD OF REDUCING MICROWAVINESS OF A SUBSTRATE FOR MEMORY HARD DISK, COMPRISING THE STEP OF POLISHING AN NI-P PLATED SUBSTRATE FOR MEMORY HARD DISK WITH THE POLISHING COMPOSITION. THE METHOD CAN BE SUITABLY USED FOR THE MANUFACTURE OF A SUBSTRATE FOR PRECISION PARTS, SUCH AS A SUBSTRATE FOR MEMORY HARD DISK.(FIG.1)
Bibliography:Application Number: MY2004PI00041