SURFACE TREATMENT DEVICE

• Main Authors: KURIHARA Yoshiaki, NAMBA Takeshi, FUKUYAMA Satoshi, NOSE Koichi
• Format: Patent
• Language: English; Spanish
• Published: 03.05.2022
• Subjects: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; THEIR RELEVANT APPARATUS; TRANSPORTING

A surface treatment device (1a) oscillates a containing unit (100) by a servomotor (120) (a stirring means) during surface treatment of a material to be treated (W) by a plasma generation device (40) (a surface treatment means) or a sputtering device (70) (a surface treatment means). This allows the material to be treated (W) contained in the containing unit (100) to be stirred, and thus uniformly performing the surface treatment on the entire surface of the material to be treated (W). Thus, even when the material to be treated (W) as an object of the surface treatment has a small three-dimensional shape, the surface treatment can be uniformly performed on the entire surface thereof. Un dispositivo de tratamiento de superficie (1a) gira una unidad de alojamiento (100) por medio de un servomotor (120) (medios de agitación) cuando un dispositivo de generación de plasma (40) (medios de tratamiento de superficie) o un dispositivo de pulverización catódica (70) (medios de tratamiento de superficie) efectúa el tratamiento de superficie sobre una pieza de trabajo (W). Por lo tanto, la pieza de trabajo (W) alojada en la unidad de alojamiento (100) se agita para efectuar el tratamiento de superficie sobre toda la superficie de la pieza de trabajo (W) uniformemente. Por lo tanto, aún en un caso donde la pieza de trabajo (W) a ser sometida en el tratamiento de superficie tiene una forma tridimensional más pequeña, el tratamiento de superficie puede efectuarse uniformemente sobre toda la superficie.