FLOW ADJUSTMENT VALVE, PUMP UNIT, AND SURFACE TREATMENT DEVICE

• Main Authors: KURIHARA Yoshiaki, NAMBA Takeshi, FUKUYAMA Satoshi, NOSE Koichi
• Format: Patent
• Language: English; Spanish
• Published: 20.04.2022
• Subjects: ACTUATING-FLOATS; BLASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COCKS; CONTROLLING; DEVICES FOR VENTING OR AERATING; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; NON-POSITIVE DISPLACEMENT PUMPS; PHYSICS; PLASMA TECHNIQUE; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; REGULATING; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TAPS; THERMAL INSULATION IN GENERAL; VALVES; WEAPONS

In order to adjust the flow of a fluid with high precision, a flow adjustment valve (150) is provided with: a flow path (151) that has an opening (152) formed at one end thereof, and through which the fluid flows; a rising/lowering valve (153) that is capable of covering the entirety of the opening (152) so as to close the opening (152), capable of opening the opening (152) by separating from the opening (152) in the opening direction of the opening (152), and capable of changing the flow area (DA) with respect to the opening (152) by changing the distance (d) from the opening (152) in the opening direction; and a servo actuator (160) that is a driving means for moving the rising/lowering valve (153) in the opening direction on the basis of a predetermined detection value. Para ajustar una velocidad de flujo de un fluido CON alta exactitud, una válvula de ajuste de velocidad de flujo 150 incluye: una porción de trayectoria de flujo 151 la cual tiene un extremo en el cual una abertura 152 se forma y en la cual fluye un fluido; una válvula de elevación 153 la cual se configura para cerrar la abertura 152 cubriendo toda la región de la abertura 152, abriendo la abertura 152 siendo separada de la abertura 152 en una dirección de abertura de la abertura 152 y modificando una distancia d de la abertura 152 en la dirección de abertura para modificar una área de flujo DA con respecto a la abertura 152; y un servoaccionador 160 como medios de accionamiento los cuales mueven la válvula de elevación 153 en la dirección de abertura sobre la base de una válvula de detección predeterminada.