PROCESS FOR TEXTURING THE SURFACE OF A SILICON SUBSTRATE, STRUCTURED SUBSTRATE AND PHOTOVOLTAIC DEVICE COMPRISING SUCH A STRUCTURED SUBSTRATE
The invention relates to a process for texturing the surface of a silicon substrate, comprising a step of exposing said surface to an MDECR plasma generated, at least from argon, using between 1.5 W/cm2 and 6.5 W/cm2 of plasma power in a matrix distributed electron cyclotron resonance plasma source,...
Saved in:
Main Authors | , , |
---|---|
Format | Patent |
Language | English Spanish |
Published |
09.10.2015
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Abstract | The invention relates to a process for texturing the surface of a silicon substrate, comprising a step of exposing said surface to an MDECR plasma generated, at least from argon, using between 1.5 W/cm2 and 6.5 W/cm2 of plasma power in a matrix distributed electron cyclotron resonance plasma source, the substrate bias being between 100 V and 300 V.
La invención se relaciona a un proceso para texturizar la superficie de un substrato de silicio, que comprende una etapa de exposición de la superficie a un plasma MDECR generado, por lo menos de argón, usando entre 1.5 W/cm2 y 6.5 W/cm2 de potencia de plasma en una fuente de plasma de resonancia ciclotrónica electrónica distribuida en matriz, la polarización del substrato que está entre 100 V y 300 V. |
---|---|
AbstractList | The invention relates to a process for texturing the surface of a silicon substrate, comprising a step of exposing said surface to an MDECR plasma generated, at least from argon, using between 1.5 W/cm2 and 6.5 W/cm2 of plasma power in a matrix distributed electron cyclotron resonance plasma source, the substrate bias being between 100 V and 300 V.
La invención se relaciona a un proceso para texturizar la superficie de un substrato de silicio, que comprende una etapa de exposición de la superficie a un plasma MDECR generado, por lo menos de argón, usando entre 1.5 W/cm2 y 6.5 W/cm2 de potencia de plasma en una fuente de plasma de resonancia ciclotrónica electrónica distribuida en matriz, la polarización del substrato que está entre 100 V y 300 V. |
Author | NADA HABKA PERE ROCA I CABARROCAS PAVEL BULKIN |
Author_xml | – fullname: PAVEL BULKIN – fullname: NADA HABKA – fullname: PERE ROCA I CABARROCAS |
BookMark | eNqNjL0KwjAURjPo4N87XJwVaiuIY0wTE2ibktyUbqVInKQt1NfwnU1BcHFwOnD4vrMks67v_IK8SqMZtxaENoC8RmdUcQWUHKwzgjIOWgAFqzLFdBHkxaKhyHcQ6FjY8_RrgRYplFKjrnSGVDFIeaVChOm8NMpObeuYnIo_7msyv7eP0W8-XJGt4Mjk3g9948ehvfnOP5u8jqPDMYpOyTmmyV-jNxUKQrA |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences |
DocumentTitleAlternate | PROCESO PARA TEXTURIZAR LA SUPERFICIE DE UN SUBSTRATO DE SILICIO, SUBSTRATO ESTRUCTURADO Y DISPOSITIVO FOTOVOLTAICO QUE COMPRENDE TAL SUBSTRATO ESTRUCTURADO. |
ExternalDocumentID | MX2014007392A |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_MX2014007392A3 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 15:00:26 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English Spanish |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_MX2014007392A3 |
Notes | Application Number: MX20140007392 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20151009&DB=EPODOC&CC=MX&NR=2014007392A |
ParticipantIDs | epo_espacenet_MX2014007392A |
PublicationCentury | 2000 |
PublicationDate | 20151009 |
PublicationDateYYYYMMDD | 2015-10-09 |
PublicationDate_xml | – month: 10 year: 2015 text: 20151009 day: 09 |
PublicationDecade | 2010 |
PublicationYear | 2015 |
RelatedCompanies | TOTAL SA |
RelatedCompanies_xml | – name: TOTAL SA |
Score | 2.8700476 |
Snippet | The invention relates to a process for texturing the surface of a silicon substrate, comprising a step of exposing said surface to an MDECR plasma generated,... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
Title | PROCESS FOR TEXTURING THE SURFACE OF A SILICON SUBSTRATE, STRUCTURED SUBSTRATE AND PHOTOVOLTAIC DEVICE COMPRISING SUCH A STRUCTURED SUBSTRATE |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20151009&DB=EPODOC&locale=&CC=MX&NR=2014007392A |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1bS8MwFA5zivqmU1GnEkT6ZHHrbdvDkC5NaWVtSi-jb6O3gQjbcBV_hf_Zk7C5PcieEk7IBznh5OQk54LQU29W5bquZLKRFwoYKIUu552BIiuzvMxVvcx6IpWS5xtOor2letpAH5tYGJEn9FskRwSJKkDea3FeL7ePWJbwrVy95O9AWrza8dCS1tYxqC-4M0jWaEgDZjEiETL0UskP-ZgmfqUU8wAd8ns0T7RPJyMelrLc1Sn2GToKAG5en6NGtWqhE7IpvdZCx976xxu6a-FbXaCfIGQE-IXBcMMxTeOEezLg2KE4SkLbJBQzG5s4cscuYT4QR7wickyfMbQJ4Q4O1paKTd_CgcNiNmHj2HQJtujEBRDCvCB0I44dJcThiP9Mv0SPNo2JI8O6pn9cnHrpDg_UK9ScL-bVNcKg0IvKyPqaapRaMej2C0XtdbOOCsZrmfU7N6i9B-h272gbnfJNEc5vgzvUrD-_qntQ4nX-IJj_CwyZlew |
link.rule.ids | 230,309,786,891,25594,76904 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1bS8MwFA5zivNNp6LOSxDpk8Wtl3V7GNKlLa22TWnT0bfR20CEbbiKv8L_7EnZdA-yp4QT8kFOODn5kpMThB60WZmpqpSK_SyXgKDkqph1h5IozbIik9Ui1epUSp7ft2PlJVGTBnrfvIWp84R-1ckRwaJysPeqXq-Xf4dYRh1buXrK3kC0eLbYyBDW7BjcF-wZBGM8MgNqUCIQMvISwQ95m1LfSkn6HtrXgBPyRPvmZMyfpSy3fYp1jA4CgJtXJ6hRrtqoRTZfr7XRobe-8Ybq2vhWp-g7CCkBfWEgbpiZCYt5JANmtomjOLR0YmJqYR1HjusQ6oNwzH9EZuYjhjImPMDB-JNi3TdwYFNGJ9RlukOwYU4cACHUC0In4thRTGyO-E_3M3RvmYzYIoxr-qvFqZds6UA-R835Yl5eIAwOPS_76UCR-4WSD3uDXJK1XtqVgbwW6aB7iTo7gK52tt6hls08d-o6_msHHfEJqgPhhteoWX18ljfg0Kvstp6IHzZmmNc |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=PROCESS+FOR+TEXTURING+THE+SURFACE+OF+A+SILICON+SUBSTRATE%2C+STRUCTURED+SUBSTRATE+AND+PHOTOVOLTAIC+DEVICE+COMPRISING+SUCH+A+STRUCTURED+SUBSTRATE&rft.inventor=PAVEL+BULKIN&rft.inventor=NADA+HABKA&rft.inventor=PERE+ROCA+I+CABARROCAS&rft.date=2015-10-09&rft.externalDBID=A&rft.externalDocID=MX2014007392A |