Foil-Based Pressure Sensor
The invention relates to a foil-based pressure sensor (1), comprising: a bottom portion (2) comprising a bottom foil (3) and at least one bottom electrode (4) disposed on the bottom foil (3), and - a top portion (5) disposed above and at least indirectly connected to the bottom portion (2) and compr...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
17.06.2020
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Subjects | |
Online Access | Get full text |
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Summary: | The invention relates to a foil-based pressure sensor (1), comprising: a bottom portion (2) comprising a bottom foil (3) and at least one bottom electrode (4) disposed on the bottom foil (3), and - a top portion (5) disposed above and at least indirectly connected to the bottom portion (2) and comprising a top foil (6) and at least one top electrode (7) disposed under the top foil (6), wherein at least one top electrode (7) is in contact with at least one bottom electrode (4) when an external pressure (pext) exceeds a turn-on point (prop). In order to facilitate accurate setting of the turn-on point of a sensor cell in a foil-based pressure sensor, the invention provides that at least one portion (2, 5) further comprises at least one support structure (20, 21) that is vertically spaced apart from the other portion (2, 5) without external pressure (pext) and that vertically abuts the other portion (2, 5) to prevent contact between the at least one top electrode (7) and the at least one bottom electrode (4) when the external pressure (pext) exceeds threshold value (PTV) below the turn-on point (PTOP). |
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Bibliography: | Application Number: LU20180101060 |