METHOD AND DEVICE FOR LASER MICROMACHINING

The invention, according to an aspect thereof, relates to a device (60) for laser micromachining a sample made of a given material, which includes a focusing module enabling a nondiffracting beam to be generated from a given incident beam, said nondiffracting beam being focused along a focusing cyli...

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Bibliographic Details
Main Authors COUAIRON, Arnaud, COURVOISIER, Francois, LACOURT, Pierre-Ambroise
Format Patent
LanguageEnglish
Lithuanian
Published 10.05.2018
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Summary:The invention, according to an aspect thereof, relates to a device (60) for laser micromachining a sample made of a given material, which includes a focusing module enabling a nondiffracting beam to be generated from a given incident beam, said nondiffracting beam being focused along a focusing cylinder that is oriented generally along the optical axis of the focusing module, means (601) for transmitting at least one first light pulse (11) suitable for generating, after said focusing module focuses in the sample, a plasma of free charges by multiphotonic absorption in a volume of the sample located on the side surface of said focusing cylinder
Bibliography:Application Number: LT20140796718T