MULTI-CHANNEL TFT
The multichannel thin film transistor includes a lower gate electrode vertically extended on a substrate, a plurality of sub semiconductor layers having a channel region superposed on the lower gate electrode and ohmic contact region extended from both side of the channel region, the sub semiconduct...
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Main Authors | , , |
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Format | Patent |
Language | English Korean |
Published |
28.08.1995
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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Summary: | The multichannel thin film transistor includes a lower gate electrode vertically extended on a substrate, a plurality of sub semiconductor layers having a channel region superposed on the lower gate electrode and ohmic contact region extended from both side of the channel region, the sub semiconductor layers being separated from one another and horizontally extended on the lower gate electrode having a gate insulating layer therebetween, source and drain electrodes which comes into contact with the sub semiconductor layers and ohmic contact region, and a upper gate electrode vertically extended on a gate insulating layer, to cover the channel region. |
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Bibliography: | Application Number: KR19920005291 |